Target stage with 6 targets which is suitable for Pulsed Laser Deposition system; The stage has possibility of spinning and target selection (wiggling function included)
Optional scanning target stage, with higher ablation uniformity, compatible with different shape of targets.
Targets: 6 x 1 inch or 3 x 2 inch
Spinning: Controlled by stepper motor
Target selection: Controlled by stepper motor (wiggling function included)
Target transfer: Single target or entire carrousel
Optional scanning target stage: The carrousel is scanned in XY direction, rather than spinning, which has higher ablation uniformity on targets.
